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Pore sealing of SiOCH ultra low-k dielectrics with polyimide Langmuir-Blodgett film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1428 / 2012
- Published online by Cambridge University Press:
- 30 July 2012, mrss12-1428-c01-05
- Print publication:
- 2012
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- Article
- Export citation