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Production of GexSi1−x, and SiC Films on Si Substrates Using Particle-Beam Technologies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 281 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 491
- Print publication:
- 1992
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- Article
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The Enhanced Outdiffusion and Its Influence on the Impurity Behavior in the Implanted Si at Rapid Electron Beam Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 279 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 219
- Print publication:
- 1992
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- Article
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