17 results
Direct-Writing of Cu Nano-Patterns with an Electron Beam
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- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue 6 / December 2015
- Published online by Cambridge University Press:
- 18 September 2015, pp. 1639-1643
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- December 2015
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Low Temperature Deposited Highly-Conductive N-type SiC Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 472 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 463
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- 1997
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The Electrical Properties of In-situ Doped Polycrystalline Silicon Thin Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at 250°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 472 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 451
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- 1997
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Diagnostic Techniques For Polycrystalline Thin Film Growth
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- Journal:
- MRS Online Proceedings Library Archive / Volume 406 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 157
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- 1995
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Polycrystalline β-SiC Film Growth on Si by ECR-CVD at 178 - 500°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 271
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- 1995
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Grain Formation in Polycrystalline Silicon Films Deposition on SiO2 at Very Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 377 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 149
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- 1995
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Microcrystalline β-SiC Growth on Si by ECR-CVD at 500°C
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- MRS Online Proceedings Library Archive / Volume 358 / 1994
- Published online by Cambridge University Press:
- 28 February 2011, 799
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- 1994
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Very Low Temperature Deposition of Polycrystalline Silicon Films with Micro-Meter-Order Grains on SiO2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 581
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- 1994
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Deposition of Hydrogenated Si Films by Hydrogenation of the SiO2 Surface and Hydrogen Dilution with PE-CVD and ECR-CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 345 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 117
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- 1994
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Novel Sulfur Treatment of SiO2 Surface for Poly Silicon Growth on SiO2/Si Structure
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- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 125
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- 1993
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Surface Cleaning and Passivation for the Growth of Si/Oxide/Si Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 137
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- 1992
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LOW-Temperature Epitaxial Growth of GaAs on Si Substrates by MBE
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- Journal:
- MRS Online Proceedings Library Archive / Volume 263 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 125
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- 1992
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Low Temperature Silicon Epitaxial Growth by Plasma Enhanced Chemical Vapor Deposition from SiH4/He/H2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 236 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 349
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- 1991
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Low Temperature Silicon Epitaxial Growth by Plasma Enhanced Chemical Vapor Deposition From SiH4/He/H2
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- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 807
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- 1991
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Low Temperature Silicon Epitaxy Grown by Electron-Beam Evaporation in an Ultra-High Vacuum System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 237 / 1991
- Published online by Cambridge University Press:
- 21 February 2011, 555
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- 1991
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Material Characterization of Low-Temperature Silicon Epitaxial Growth on Patterned Oxidized Wafers by ULPCVD From SiH4/SiF4/H2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 389
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- 1990
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Structural Defects of Silicon Epitaxy and Epi/Substrate Interface Related to Improper In-Situ Surface Cleaning at Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 401
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- 1990
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