1 results
Effects of Silicon Implantation and Processing Temperature on Performance of Polycrystalline Silicon Thin-Film Transistors Fabricated from Low Pressure Chemical Vapor Deposited Amorphous Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 106 / 1987
- Published online by Cambridge University Press:
- 22 February 2011, 305
- Print publication:
- 1987
-
- Article
- Export citation