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Imaging Thin Films of Nanoporous Low-k Dielectrics: Comparison between Ultramicrotomy and Focused Ion Beam Preparations for Transmission Electron Microscopy
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- Journal:
- Microscopy and Microanalysis / Volume 12 / Issue 2 / April 2006
- Published online by Cambridge University Press:
- 09 December 2005, pp. 156-159
- Print publication:
- April 2006
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- Article
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