1 results
Suppression of Surface SiO2 Layer and Solid Phase Epitaxy of Amorphously Deposited Si Films using Heating-Up Under Si2H6 Environment
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 448 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 345
- Print publication:
- 1996
-
- Article
- Export citation