1 results
Fabrication of Micromachined Piezoelectric Diaphragm Pumps Actuated by Interdigitated Transducer Electrodes
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 741 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, J5.7
- Print publication:
- 2002
-
- Article
- Export citation