3 results
Effect of Slurry Temperature on Cu Chemical Mechanical Polishing with Different Oxidizing Agents
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W6.6
- Print publication:
- 2005
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Effect of Temperature on Defect Generation during Copper Chemical Mechanical Planarization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W1.5
- Print publication:
- 2005
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Mechanical Characterization of Multilayer Thin Film Stacks Containing Porous Silica Using Nanoindentation and the Finite Element Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 875 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, O2.3
- Print publication:
- 2005
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