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Moisture Induced Degradation of Porous Low-k Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F02-06
- Print publication:
- 2006
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- Article
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Influence of Grain Orientation on the Microstructural Characterization in Cu During (self)-Anneal using a Surface Acoustic wave Technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F06-09
- Print publication:
- 2006
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- Article
- Export citation