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Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)
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- Journal:
- MRS Bulletin / Volume 11 / Issue 1 / February 1986
- Published online by Cambridge University Press:
- 29 November 2013, p. 2
- Print publication:
- February 1986
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