3 results
Submicron displacement measurements of MEMS using optical microphotographs in aqueous media: Enhancement using color image processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1659 / 2014
- Published online by Cambridge University Press:
- 15 January 2014, pp. 43-48
- Print publication:
- 2014
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Dicing of Fragile MEMS Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1139 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG01-09
- Print publication:
- 2008
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Low Temperature Silicon Nitride Films Deposited on 3D Topography by Hot Wire Chemical Vapor Deposition (HWCVD)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1036 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1036-M03-01
- Print publication:
- 2007
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