2 results
Application of Scatterometry to BEOL Measurements: Post Cu CMP Measurements
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C12-03
- Print publication:
- 2007
-
- Article
- Export citation
Silicon CMOS BEOL Compatible Optical Waveguide Micro-mirrors
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 744 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, M8.17
- Print publication:
- 2002
-
- Article
- Export citation