6 results
Temperature Dependence of Stress Distribution in Depth for Cu Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 854 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, U11.11
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- 2004
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Highly (111) Oriented Al Thin Films by Ion-Plating Method Using Discharge Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 714 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, L8.6.1
- Print publication:
- 2001
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Al-RE-TM (RE = Rare-Earth Metals, TM = Transition Metals) Ternary Alloy Films for TFT-LCD Electrodes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 508 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 327
- Print publication:
- January 1998
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Effects of Sc or Tb Addition on the Microstructures and Resistivities of Al Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 500 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 107
- Print publication:
- 1997
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Effects of Addition of Heavy Rare-Earth Elements on the Structures and Resistivities of Al Thin Films for TFT - LCD Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 441 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 107
- Print publication:
- 1996
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Annealing Characteristics of Al-Light-Rare-Earth Alloy Thin Films for Microelectronic Conductor Lines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 645
- Print publication:
- 1995
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