4 results
Improvement of Surface Crystalline Quality of an Epitaxial (100)ZrN Film as a Bottom Electrode Diffusion Barrier for Ferroelectric Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 688 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, C4.24.1
- Print publication:
- 2001
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Suppression of Oxidation of an Epitaxial (100)ZrN Film on Si During the Deposition of Ir Film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 655 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, CC4.2.1
- Print publication:
- 2000
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Heteroepitaxial Growth of Ir/ZrN Layered Electrode on (100)Si Substrate for Ferroelectric Capacitor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 596 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 85
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- 1999
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Heteroepitaxial Growth of PZT Film on (100)Ir/(100)YSZ/(100)Si Substrate Structure Prepared by Reactive Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 541 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 351
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- 1998
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