2 results
Improvement of coating deposition and target erosion uniformity in rotating cylindrical magnetrons
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- Journal:
- Laser and Particle Beams / Volume 21 / Issue 2 / April 2003
- Published online by Cambridge University Press:
- 21 August 2003, pp. 279-283
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Amorphous hydrogenated carbon films deposited by a closed-drift ion source
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- Journal:
- Laser and Particle Beams / Volume 21 / Issue 2 / April 2003
- Published online by Cambridge University Press:
- 21 August 2003, pp. 285-289
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- Article
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