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Voids Investigation of Amorphous Carbon Films Deposited by DC-Magnetron Sputtering: A Small Angle x-ray Scattering and Gas Thermal Effusion Study
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- Journal:
- MRS Online Proceedings Library Archive / Volume 593 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 383
- Print publication:
- 1999
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- Article
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Influence of Silicon Incorporation on the Properties of Hard a-C:H Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 349 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 529
- Print publication:
- 1994
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- Article
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