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Passivation of Silicon Surfaces by Formation of Thin Silicon Oxide Films Formed by Combination of Induction-Coupled Remote Oxygen Plasma with High Pressure H2O Vapor Heat Treatment
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1426 / 2012
- Published online by Cambridge University Press:
- 10 May 2012, pp. 289-294
- Print publication:
- 2012
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- Article
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Formation of Aluminum Oxide Films on Silicon Surface by Aluminum Evaporation in Oxygen Gas Atmosphere
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1426 / 2012
- Published online by Cambridge University Press:
- 10 May 2012, pp. 421-426
- Print publication:
- 2012
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- Article
- Export citation