3 results
Optimization of Ion Implantation processes for 4H-SiC DIMOSFET
-
- Journal:
- MRS Advances / Volume 1 / Issue 55 / 2016
- Published online by Cambridge University Press:
- 18 May 2016, pp. 3673-3678
- Print publication:
- 2016
-
- Article
- Export citation
Epitaxial Si1-xGex Films and Superlattice Structures Grown by CVD for Infrared Photodetectors
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 770 / 2003
- Published online by Cambridge University Press:
- 10 February 2011, I4.7
- Print publication:
- 2003
-
- Article
- Export citation
The Early Oxynitridation Stages of Hydrogen-Terminated Single-Crystalline Silicon in N2O Ambient
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 648 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, P6.4
- Print publication:
- 2000
-
- Article
- Export citation