2 results
Energy efficiency enhancements for semiconductors, communications, sensors and software achieved in cool silicon cluster project*
-
- Journal:
- The European Physical Journal - Applied Physics / Volume 63 / Issue 1 / July 2013
- Published online by Cambridge University Press:
- 05 July 2013, 14402
- Print publication:
- July 2013
-
- Article
- Export citation
Microstructure and degradation mechanisms of TaSiN diffusion barriers for Cu interconnects
-
- Journal:
- Microscopy and Microanalysis / Volume 9 / Issue S03 / September 2003
- Published online by Cambridge University Press:
- 05 September 2003, pp. 248-249
- Print publication:
- September 2003
-
- Article
- Export citation