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Laser-Induced Crystallization of SiGe MEMS Structural Layers Deposited at Temperatures Below 250°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1153 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1153-A19-03
- Print publication:
- 2009
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- Article
- Export citation