3 results
Effectiveness of Nitride Diffusion Barriers in a Self-Encapsulated Copper-Based Metallization.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 231
- Print publication:
- 1994
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Enhanced Adhesion of Copper Films to SiO2, PSG and BPSG by Refractory Metal Additions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 613
- Print publication:
- 1994
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Investigation of Chromium Nitridation Using Ion Beam Resonance Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 619
- Print publication:
- 1994
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- Article
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