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C-V and Capacitance Transient Analysis of Self-Implanted Amorphous Si Layers Regrown by Swept-Line Electron Beam (Sled) Annealing†
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1 / 1980
- Published online by Cambridge University Press:
- 15 February 2011, 353
- Print publication:
- 1980
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- Article
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