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Epitaxial integration of TiO2 with Si(100) through a novel approach of oxidation of TiN/Si(100) epitaxial heterostructure
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- Journal:
- MRS Advances / Volume 1 / Issue 37 / 2016
- Published online by Cambridge University Press:
- 20 June 2016, pp. 2629-2634
- Print publication:
- 2016
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- Article
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