1 results
Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation
-
- Journal:
- The European Physical Journal - Applied Physics / Volume 42 / Issue 2 / May 2008
- Published online by Cambridge University Press:
- 28 March 2008, pp. 103-107
- Print publication:
- May 2008
-
- Article
- Export citation