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An Investigation Of Vacancy Population During Arsenic Activation In Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 442 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 151
- Print publication:
- 1996
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Effects of Arsenic Deactivation on Arsenic-Implant Induced Enhanced Diffusion in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 167
- Print publication:
- 1995
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- Article
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