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A Novel Method for Low-Resistivity Metal-Interconnection by Using Metallic Functional Liquids and Catalytically Generated Hydrogen Atoms
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1401 / 2012
- Published online by Cambridge University Press:
- 17 May 2012, mrsf11-1401-t05-30
- Print publication:
- 2012
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- Article
- Export citation