2 results
Atomic Scale Modeling of ZrO2 and HfO2 Atomic Layer Deposition on Silicon: Linking Density Functional Theory and Kinetic Monte Carlo
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- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E6.28
- Print publication:
- 2003
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- Article
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Simulation of surface morphology and defects in heteroepitaxied thin films
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- Journal:
- The European Physical Journal - Applied Physics / Volume 13 / Issue 3 / March 2001
- Published online by Cambridge University Press:
- 15 March 2001, pp. 171-176
- Print publication:
- March 2001
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- Article
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