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Characterization of Porous Silicate Low-k Films by Ellipsometric Porosimetry and Variable-energy Positron Annihilation Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 788 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, L8.19
- Print publication:
- 2003
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- Article
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Film Properties of Low-Density and Ultra-Low-Dielectric-Constant Material
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 63
- Print publication:
- 1999
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- Article
- Export citation