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Effect Of RTA On TiN Films As The Barrier Layer for Pt/BST/Pt Capacitors Prepared By RF Magnetron Co-sputter Technique At Low Substrate Temperature
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- Journal:
- MRS Online Proceedings Library Archive / Volume 672 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, O71.1
- Print publication:
- 2001
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- Article
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