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Nanoscale Surface Patterning of Silicon Using Local Swelling Induced by He Implantation through NSL-Masks
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1181 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1181-DD10-02
- Print publication:
- 2009
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- Article
- Export citation