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A Study on Solid Phase Reactions of Ni and Pt on Si-Ge Alloys as Contacts to Ultra-Shallow P+N Junctions for CMOS Technology Nodes Beyond 70nm
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- Journal:
- MRS Online Proceedings Library Archive / Volume 670 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, K7.2
- Print publication:
- 2001
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- Article
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