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Atomistic Simulation Techniques in Front-End Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E06-01
- Print publication:
- 2008
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Atomistic Modeling of Ion Beam Induced Defects in Si: From Point Defects to Continuous Amorphous Layers.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C10.1
- Print publication:
- 2004
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- Article
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Atomistic Analysis of the Role of Silicon Interstitials in Boron Cluster Dissolution
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C7.3
- Print publication:
- 2004
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- Article
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