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Formation of NiSi-Silicided p + n Shallow Junctions Using Implant Through Silicide and Low Temperature Furnace Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 765 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D6.21
- Print publication:
- 2003
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- Article
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Phase Transformation of Mo and W over Co OR Its Alloy in Contact with Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 311 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 329
- Print publication:
- 1993
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- Article
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