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Deposition of silicon carbide using the chemical vapor composites process: Process characterization and comparison with RASSPVDN model predictions
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- Journal:
- Journal of Materials Research / Volume 8 / Issue 7 / July 1993
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1651-1665
- Print publication:
- July 1993
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- Article
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