6 results
Alternative Catalysts For Si-Technology Compatible Growth Of Si Nanowires
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1017 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1017-DD01-10-EE01-10
- Print publication:
- 2007
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Study of pulsed RF DPN process parameters for 65 nm node MOSFET gate dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 811 / 2004
- Published online by Cambridge University Press:
- 28 July 2011, D2.10
- Print publication:
- 2004
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Characterization and Integration in Cu Damascene Structures of AURORA, an Inorganic Low-k Dielectric
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- Journal:
- MRS Online Proceedings Library Archive / Volume 612 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, D5.14.1
- Print publication:
- 2000
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Effect of Cl in Gate Oxidation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 473 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 149
- Print publication:
- 1997
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Effect of Cl in Gate Oxidation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 89
- Print publication:
- 1997
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Chlorine Precursors For Gate Oxidation Processes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 447 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 115
- Print publication:
- 1996
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