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Peculiarities in the Epitaxial Regrowth of Ion-Implanted Si1−xGex Alloy Layers Grown on Compositionally Graded Buffers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 373 / 1994
- Published online by Cambridge University Press:
- 16 February 2011, 505
- Print publication:
- 1994
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- Article
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