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How Many Microscopies Does It Take to Get to the Root Cause of the Fail? Sample Prep, Imaging, and In-Situ Analysis for Integrated Circuit Failure Analysis at the 14nm Node
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- Journal:
- Microscopy and Microanalysis / Volume 27 / Issue S1 / August 2021
- Published online by Cambridge University Press:
- 30 July 2021, pp. 782-783
- Print publication:
- August 2021
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- Article
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