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Interface quality of atomic layer deposited La-doped ZrO2 films on Ge-passivated In0.15Ga0.85As substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1194 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1194-A08-10
- Print publication:
- 2009
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- Article
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