2 results
Temperature-Dependent Coefficient of Thermal Expansion of Silicon Nitride Films Used in Microelectromechanical Systems
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- Journal:
- MRS Online Proceedings Library Archive / Volume 605 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 235
- Print publication:
- 1999
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- Article
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Numerical Simulation of Scanning Speed and Supercooling Effects During Zone-Melting-Recrystallization of Soi Wafers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 205 / 1990
- Published online by Cambridge University Press:
- 26 February 2011, 453
- Print publication:
- 1990
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- Article
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