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Atomic Layer Deposition of Silica and Group IV Metal Oxides Nanolaminates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E6.24
- Print publication:
- 2003
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- Article
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Combinatorial Chemical Vapor Deposition of Metal Silicate Films Using Tri(t -butoxy) silanol and Anhydrous Metal Nitrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 804 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, JJ2.3
- Print publication:
- 2003
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- Article
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