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A Study of Gallium FIB induced Silicon Amorphization using TEM, APT and BCA Simulation
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- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 1839-1840
- Print publication:
- August 2015
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- Article
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