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Atomic Scale Modeling of ZrO2 and HfO2 Atomic Layer Deposition on Silicon: Linking Density Functional Theory and Kinetic Monte Carlo
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- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E6.28
- Print publication:
- 2003
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- Article
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The Interaction of H Atoms with Interstellar Dust Particles: Models
- from 2 - Formation - Destruction
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- Book:
- Molecular Hydrogen in Space
- Published online:
- 04 August 2010
- Print publication:
- 06 November 2000, pp 89-98
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- Chapter
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