2 results
Process and Simulation of TiSi2/n+/p Silicon Shallow Junctions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 305
- Print publication:
- 1991
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- Article
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Magnetron Reactive Ion Etching of GaAs: Plasma Chemical Aspects and Surface Damage Studies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 190 / 1990
- Published online by Cambridge University Press:
- 21 February 2011, 285
- Print publication:
- 1990
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- Article
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