2 results
Reliability of Electrodeposited Copper and Ecrcvd Siof Films for Multilevel Metallization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 93
- Print publication:
- 1999
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- Article
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NH3-Plasma Treatment of Gaas Surface at High Temperature in Remote Plasma and Direct Plasma Reactor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 318 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 533
- Print publication:
- 1993
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- Article
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