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Mass Spectrometric Study of ECR Microwave Plasma Etching of Si3N4 Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 268 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 11
- Print publication:
- 1992
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- Article
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Characterization of an ECR Microwave Plasma Etching System
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 269 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 121
- Print publication:
- 1992
-
- Article
- Export citation