3 results
Relaxation of SiGe Films for the Fabrication of Strained Si Devices
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 765 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D4.4.1/G1.4
- Print publication:
- 2003
-
- Article
- Export citation
Relaxation of SiGe Films for the Fabrication of Strained Si Devices
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 768 / 2003
- Published online by Cambridge University Press:
- 02 August 2011, G1.4/D4.4
- Print publication:
- 2003
-
- Article
- Export citation
Post CMP Cleaning Using Ice Scrubber Cleaning
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 386 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 121
- Print publication:
- 1995
-
- Article
- Export citation