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Defects in Low-k Insulators (κ=2.5 – 2.0): ESR Analysis and Charge Injection
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1335 / 2011
- Published online by Cambridge University Press:
- 18 August 2011, mrss11-1335-o04-04
- Print publication:
- 2011
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- Article
- Export citation