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Depth-dependent defect and residual stress distribution in magnetron sputtered MoN:Cu nanocomposite films by x-ray microdiffraction
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- Journal:
- MRS Online Proceedings Library Archive / Volume 977 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 977-FF08-05
- Print publication:
- 2006
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- Article
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