2 results
Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 20 January 2011, mrsf10-1299-s02-05
- Print publication:
- 2011
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- Article
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Laser-Induced Crystallization of SiGe MEMS Structural Layers Deposited at Temperatures Below 250°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1153 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1153-A19-03
- Print publication:
- 2009
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- Article
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