Changes in microstructure of Zr, Ti, and Ti-6%Al-%V resulting
from ion-beam sputtering used to prepare samples for transmission
electron microscopy have been correlated with hydrogen absorption.
Zr was particularly sensitive to this phenomenon, resulting
in extensive hydride formation in thin foil samples. Hydrogen
enrichment extending to several micrometers in depth could also
be produced in bulk samples in a few hours of sputtering. The
performance of various sputtering units in different configurations
has been examined. It is concluded that hydride formation appears
to be caused primarily by the presence of hydrocarbons, for
example, from the backstreaming of diffusion pump oil, in the
residual vacuum background of the sputtering chamber.